MEMS Iris Mechanism
نویسندگان
چکیده
An iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains four shutter blades, which are each driven by a separate actuator and translated synchronously to create a square aperture. Devices based on buckling mode electrothermal actuators and formed by deep reactive ion etching of bonded silicon-on-insulator are demonstrated. Symmetric deflections are obtained, and variable attenuation is demonstrated using thermally expanded core fibres.
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